Kui Li, Huixiang Lin, Jin Niu, Hao Xu, Yutong Wang, Zhongwei Fan, Changjun Ke, Xiaoshi Zhang, Fucai Zhang, Jie Li，“Tabletop ptychographic imaging system with a 515 nm laser driven high-order harmonic source”，Optics and Lasers in Engineering 176, 108105（2024）

【原文】

Tabletop ptychographic imaging system with a 515 nm laser driven high-order harmonic source

ABSTRACT

We have developed a high-throughput, tabletop ptychographic imaging system based on a high-order harmonic, extreme ultraviolet (EUV) light source. Driven by a 1.8 W, 180 fs, 4 kHz, 515 nm femtosecond laser, three neighboring high-order harmonics centered around 46.8 nm is obtained with a total power of 43 μW. Utilizing the light source without any monochromatization, we conducted multi-wavelength ptychography imaging with a large field of view (FOV) of 100 μm × 100 μm, and at a high rate of 0.4 Mpix/h.