Rui Chen, Angyi Lin, Jianfeng You, Huixiang Lin, Wenqing Zhao, Fucai Zhang，“Construction and optimization of a computational holographic lithography system”，Speckle 2023: VIII International Conference on Speckle Metrology 13070, 390-396（2024）

【原文】

Construction and optimization of a computational holographic lithography system

ABSTRACT

Traditional lithography techniques are currently facing challenges, including high costs and the susceptibility of mask plates to damage. This research aims to elucidate the feasibility and technical constraints of a novel diffraction lithography approach. This method can reduce the size and cost of lithography machines, break through existing technological barriers, and offer new possibilities for the future development of lithography machines.

We have built a basic computational holographic lithography system utilizing a 405nm laser and validated the system using holograms obtained with both classical GS algorithm and a newly proposed method. With the GS holograms, patterns with 700nm features have been successfully exposed on the photoresist. With our new algorithms, multiple holograms for the same target pattern can be generated with different settings in the algorithm. Sequential exposure of those ...